Flexible thermoelectric generator based on transfer printed Si microwires

Khan, S., Dahiya, R.S. and Lorenzelli, L. (2014) Flexible thermoelectric generator based on transfer printed Si microwires. In: ESSDERC 2014: 44th European Solid-State Device Conference, Venice, Italy, 22-26 Sep 2014, ISBN 9781479943760

Abstract

This paper presents development of a flexible thermoelectric energy harvester by using transfer printed doped Silicon ( Si) microwires. The thermoelectric generator ( TEG) module, consisting of an array of 34 alternately doped p-type and n-type Si microwires, is developed on a Si on insulator ( SOI) wafer using standard photolithography and etching techniques. The Si wires in the TEG module are 5mm long, 50 mu m wide, and the spacing between two adjacent wires is 50 mu m. The TEG modules are transferred from SOI wafer to Poly ( ethylene terephthalate) ( PET) substrate by using transfer printing method, with Polydimethylsiloxane ( PDMS) as transfer substrate. More than 90% of wires are transferred in the first transfer step ( i.e. from wafer to PDMS) and 100% are transferred in the second step ( i.e. PDMS to PET) has been achieved in this process. A maximum of 9.3mV open circuit voltage was recorded from the flexible micro TEG prototype with a temperature difference of 54 degrees C at two ends of the wires.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Dahiya, Professor Ravinder
• Authors: Khan, S., Dahiya, R.S., and Lorenzelli, L.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• ISSN: 1930-8876
• ISBN: 9781479943760