Khalid, A. , Thoms, S. , Macintyre, D., Thayne, I.G. and Cumming, D.R.S. (2014) Fabrication of submicron planar Gunn diode. In: 26th International Conference on Indium Phosphide and Related Materials, Montpelier, France, 11-15 May 2014, (doi: 10.1109/ICIPRM.2014.6880542)
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Publisher's URL: http://csw2014.org/
Abstract
We present, for the first time, the fabrication process for a submicron planar Gunn diode in In<sub>0.53</sub>Ga<sub>0.47</sub>As on an InP substrate operating at 265 GHz. A novel two stage lift off method has been developed to achieve a submicron gaps between contacts down to 135 nm with widths up to 120 μm.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Cumming, Professor David and Khalid, Dr Ata-Ul-Habib and Thoms, Dr Stephen and Macintyre, Dr Douglas |
Authors: | Khalid, A., Thoms, S., Macintyre, D., Thayne, I.G., and Cumming, D.R.S. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Publisher Policy: | Reproduced with the permission of the authors |
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