Scanning thermal microscopy using batch fabricated thermocouple probes

Mills, G., Zhou, H., Midha, A., Donaldson, L. and Weaver, J.M.R. (1998) Scanning thermal microscopy using batch fabricated thermocouple probes. Applied Physics Letters, 72(22), pp. 2900-2902. (doi: 10.1063/1.121453)

Abstract

We have developed scanning thermal microscopy probes for high resolution analysis of thermal properties in an atomic force microscope(AFM).Electron beamlithography and silicon micromachining have been used to batch fabricate Au/Pd thermocouples situated at the end of Si3N4 cantilevers. The cantilevers are patterned on the side of traditional style pyramidal AFM tips, giving a new shape of probe which is favorable for access to specimens containing significant topographic variation. Tip radius is approximately 50 nm and the probe has a macroscopic opening angle of 70°. The probes were scanned in the repulsive mode using a conventional AFM. Force feedback was optically employed to give topographic and thermal maps simultaneously by maintaining a constant force of approximately 5 nN. During initial scans using a photothermal test specimen, 80 nm period metal gratings were thermally resolved.

• Item Type: Articles
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Zhou, Dr Haiping and Weaver, Professor Jonathan
• Authors: Mills, G., Zhou, H., Midha, A., Donaldson, L., and Weaver, J.M.R.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• Journal Name: Applied Physics Letters
• ISSN: 0003-6951
• ISSN (Online): 1077-3118