Greer, A. I.M. , Seunarine, K., Khokhar, A. Z., MacLaren, I. , Brydone, A. S., Moran, D. A.J. and Gadegaard, N. (2013) Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification. Microelectronic Engineering, 112, pp. 67-73. (doi: 10.1016/j.mee.2013.05.016)
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Abstract
In this work the direct transfer of nanopatterns into titanium is demonstrated. The nanofeatures are imprinted at room temperature using diamond stamps in a single step. We also show that the imprint properties of the titanium surface can be altered by anodisation yielding a significant reduction in the required imprint force for pattern transfer. The anodisation process is also utilised for curved titanium surfaces where a reduced imprint force is preferable to avoid sample deformation and damage. We finally demonstrate that our process can be applied directly to titanium rods.
| Item Type: | Articles |
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| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Seunarine, Dr Krishna and Khokhar, Dr Ali and MacLaren, Dr Ian and Moran, Professor David and Greer, Dr Andrew and Gadegaard, Professor Nikolaj |
| Authors: | Greer, A. I.M., Seunarine, K., Khokhar, A. Z., MacLaren, I., Brydone, A. S., Moran, D. A.J., and Gadegaard, N. |
| College/School: | College of Science and Engineering > School of Engineering > Biomedical Engineering College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering College of Science and Engineering > School of Physics and Astronomy |
| Journal Name: | Microelectronic Engineering |
| Publisher: | Elsevier |
| ISSN: | 0167-9317 |
| ISSN (Online): | 1873-5568 |
| Copyright Holders: | Copyright © 2013 The Authors |
| First Published: | First published in Microelectronic Engineering 112:67-73 |
| Publisher Policy: | Reproduced under a Creative Commons License |
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