Bernassau, A.L., McKay, S., Hutson, D., Demore, C.E.M., Garcia-Gancedo, L., Button, T.W., McAneny, J.J. and Cochran, S. (2007) Surface Preparation of 1-3 Piezocomposite Material for Microfabrication of High Frequency Transducer Arrays. In: 2007 IEEE International Ultrasonics Symposium (IUS), New York, NY, USA, 28-31 Oct 2007, pp. 96-99. ISBN 9781424413836 (doi: 10.1109/ULTSYM.2007.37)
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Abstract
A key issue in the development of ultrasound imaging arrays to operate at frequencies above 30 MHz is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires planar, parallel and smooth surfaces. This paper reports an investigation of the surface finishing of 1-3 piezocomposite material by mechanical lapping and/polishing that has demonstrated that excellent surface flatness can be obtained. Subsequently, high frequency array elements have been fabricated on these surfaces using a low temperature lift-off photolithography process. A 50 MHz linear array with 30 mum element pitch has been patterned on the lapped and polished surface of a low frequency 1-3 piezocomposite. Good electrode edge definition and electrical contact to the composite were obtained. Additionally, patterning has been demonstrated on a fine-scale composite, itself suitable for operation above 30 MHz.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Bernassau, Dr Anne and Cochran, Professor Sandy and Demore, Dr Christine |
Authors: | Bernassau, A.L., McKay, S., Hutson, D., Demore, C.E.M., Garcia-Gancedo, L., Button, T.W., McAneny, J.J., and Cochran, S. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering College of Science and Engineering > School of Engineering > Systems Power and Energy |
ISSN: | 1051-0117 |
ISBN: | 9781424413836 |
Published Online: | 26 December 2007 |
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