Liu, Z., Chen, X., Zhang, Y., Weaver, J. and Roberts, C.J. (2012) An optical leveling technique for parallel near-field photolithography system. Applied Physics Letters, 101(17), p. 173112. (doi: 10.1063/1.4764912)
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| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Weaver, Professor Jonathan and Zhang, Dr Yuan |
| Authors: | Liu, Z., Chen, X., Zhang, Y., Weaver, J., and Roberts, C.J. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Applied Physics Letters |
| ISSN: | 0003-6951 |
| Published Online: | 25 October 2012 |
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