Khokhar, A.Z., Gaston, A., Obieta, I. and Gadegaard, N. (2011) Compact LED based nanoimprinter for UV-NIL. Microelectronic Engineering, 88(11), pp. 3347-3352. (doi: 10.1016/j.mee.2011.06.023)
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Publisher's URL: http://dx.doi.org/10.1016/j.mee.2011.06.023
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Khokhar, Dr Ali and Gadegaard, Professor Nikolaj |
| Authors: | Khokhar, A.Z., Gaston, A., Obieta, I., and Gadegaard, N. |
| College/School: | College of Science and Engineering > School of Engineering > Biomedical Engineering College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
| ISSN: | 0167-9317 |
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