Thoms, S. , Gnan, M., Macintyre, D., Samarelli, A., Sorel, M. , Strain, M. and De La Rue, R. (2008) Optical characterisation of an HSQ lithography process. In: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN), Portland, USA, 27-30 May 2008,
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Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | No |
Glasgow Author(s) Enlighten ID: | Sorel, Professor Marc and De La Rue, Professor Richard and Samarelli, Mr Antonio and Thoms, Dr Stephen and Strain, Dr Michael and Macintyre, Dr Douglas |
Authors: | Thoms, S., Gnan, M., Macintyre, D., Samarelli, A., Sorel, M., Strain, M., and De La Rue, R. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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