Sample preparation for nanoanalytical electron microscopy using the FIB lift-out method and low energy ion milling

Scott, J. , Docherty, F.T., MacKenzie, M., Smith, W. , Miller, B., Collins, C.L. and Craven, A.J. (2006) Sample preparation for nanoanalytical electron microscopy using the FIB lift-out method and low energy ion milling. Journal of Physics: Conference Series, 26(1), pp. 223-226. (doi: 10.1088/1742-6596/26/1/053)

Abstract

Thinning specimens to electron transparency for electron microscopy analysis can be done by conventional (2 - 4 kV) argon ion milling or focused ion beam (FIB) lift-out techniques. Both these methods tend to leave ''mottling'' visible on thin specimen areas, and this is believed to be surface damage caused by ion implantation and amorphisation. A low energy (250 - 500 V) Argon ion polish has been shown to greatly improve specimen quality for crystalline silicon samples. Here we investigate the preparation of technologically important materials for nanoanalysis using conventional and lift-out methods followed by a low energy polish in a GentleMill™ low energy ion mill. We use a low energy, low angle (6 - 8°) ion beam to remove the surface damage from previous processing steps. We assess this method for the preparation of technologically important materials, such as steel, silicon and GaAs. For these materials the ability to create specimens from specific sites, and to be able to image and analyse these specimens with the full resolution and sensitivity of the STEM, allows a significant increase of the power and flexibility of nanoanalytical electron microscopy.

• Item Type: Articles
• Additional Information: EMAG–NANO 2005: Imaging, Analysis and Fabrication on the Nanoscale 31 August–2 September 2005, University of Leeds, UK
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Docherty, Dr Frances and Scott, Dr Jamie and Craven, Professor Alan and Miller, Mr Brian and Smith, Mr William and MacKenzie, Dr Maureen
• Authors: Scott, J., Docherty, F.T., MacKenzie, M., Smith, W., Miller, B., Collins, C.L., and Craven, A.J.
• Subjects: Q Science > QC Physics
• College/School: College of Science and Engineering > School of Physics and Astronomy
• Research Group: Solid State Physics
• Journal Name: Journal of Physics: Conference Series
• Publisher: Institute of Physics
• ISSN: 1742-6588
• ISSN (Online): 1742-6596
• Copyright Holders: Copyright © 2006 Institute of Physics
• First Published: First published in Journal of Physics: Conference Series 26(1):223-226
• Publisher Policy: Reproduced in accordance with the copyright policy of the publisher

Project Code	Award No	Project Name	Principal Investigator	Funder's Name	Funder Ref	Lead Dept
35857	3	Sub 100nm 111-V MOSFET's for Digital Applications	Iain Thayne	Engineering & Physical Sciences Research Council (EPSRC)	GR/S61218/01	Electronic and Nanoscale Engineering
24419	1	The Evolution of Precipitation During the Processing of Thin Slab Cast Microalloyed Steel	Alan Craven	Engineering & Physical Sciences Research Council (EPSRC)	GR/M22888	Physics and Astronomy
35067	1	Chemistry, structure and bonding in high-k gate oxide stacks	Alan Craven	Engineering & Physical Sciences Research Council (EPSRC)	GR/S44280/01	Physics and Astronomy