Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

La Spina, L., Ovchinnikov, D., Wien, W.H.A., van Herwaarden, A.W., Goudena, E.J.G., Loos, J. and Nanvera, L.K. (2008) Reduction of surface roughness of a silicon chip for advanced nanocalorimetry. Sensors and Actuators A: Physical, 144(2), pp. 403-409. (doi: 10.1016/j.sna.2008.02.010)

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Item Type:Articles
Additional Information:Article
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Loos, Professor Joachim
Authors: La Spina, L., Ovchinnikov, D., Wien, W.H.A., van Herwaarden, A.W., Goudena, E.J.G., Loos, J., and Nanvera, L.K.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Sensors and Actuators A: Physical
ISSN:0924-4247

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