Neale, S. , Hsu, H.Y., Valley, J.K., Jamshidi, A. and Wu, M.C. (2009) Using MEMs mirrors to pattern electrical forces. In: SPIE Photonics West, San Jose, CA, USA, 24-29 Jan 2009,
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| Item Type: | Conference Proceedings |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Neale, Professor Steven |
| Authors: | Neale, S., Hsu, H.Y., Valley, J.K., Jamshidi, A., and Wu, M.C. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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