Jugessur, A.S., Dou, J., Aitchison, J.S., De La Rue, R.M. and Gnan, M. (2009) A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications. Microelectronic Engineering, 86(4-6), pp. 1488-1490. (doi: 10.1016/j.mee.2008.12.002)
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Abstract
A photonic wire Bragg grating structure, integrated with fluidic channels and reservoirs for fluid sensing based on refractive index changes, has been designed using 3-D Finite Domain Time Difference (FDTD) method and fabricated using electron beam lithography and reactive ion etching on an Silicon-on-Insulator (SOI) material. A scheme is developed where a Polydimethylsiloxane (PDMS) microfluidic chip is integrated with the SOI photonic chip via a reversible active sealing method. The highest sensitivity (Delta n/Delta lambda) of the device is estimated to be 5.5 x 10(-3) nm(-1) and the volume of the sensing region is approximately 2 mu m(3). This device could be a potential candidate for lab-on-a-chip devices for bio-sensing applications.
| Item Type: | Articles |
|---|---|
| Keywords: | Bragg grating channel CHIP device devices Electron beam electron beam lithography etching fluid Lab-On-A-Chip lithography Micro total analysis systems Microfluidic Nano-biosensor Optofluidic systems Photonic band-gap polydimethylsiloxane reactive ion etching REFRACTIVE-INDEX SENSORS silicon-on-insulator soi SURFACE-PLASMON RESONANCE time volume |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | De La Rue, Professor Richard |
| Authors: | Jugessur, A.S., Dou, J., Aitchison, J.S., De La Rue, R.M., and Gnan, M. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
| ISSN: | 0167-9317 |
| Published Online: | 13 December 2008 |
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