Thoms, S. and Macintyre, D.S. (2002) High resolution lithography. In: McGeough, J.A. (ed.) Micromachining of Engineering Materials. Series: Mechanical engineering (139). Marcel Deckker: New York, USA. ISBN 9780824706449
Full text not currently available from Enlighten.
Abstract
No abstract available.
Item Type: | Book Sections |
---|---|
Status: | Published |
Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen and Macintyre, Dr Douglas |
Authors: | Thoms, S., and Macintyre, D.S. |
Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Publisher: | Marcel Deckker |
ISBN: | 9780824706449 |
University Staff: Request a correction | Enlighten Editors: Update this record