Yang, L., Watling, J., Wilkins, R., Barker, J. and Asenov, A. (2004) Reduced interface roughness in sub-100nm strained Si n-MOSFETs - A Monte Carlo simulation study. In: 5th European Workshop on Ultimate Integration of Silicon - ULIS04, Leuven, Belgium, pp. 23-26.
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Item Type: | Conference Proceedings |
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Keywords: | Integration, Interface, Interface Roughness, Monte Carlo, Monte Carlo Simulation, Monte-Carlo-Simulation, N-MOSFETS, Si, Silicon, Simulation, Strained Si, Strained-Si |
Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Barker, Professor John and Watling, Dr Jeremy and Asenov, Professor Asen |
Authors: | Yang, L., Watling, J., Wilkins, R., Barker, J., and Asenov, A. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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