Thoms, S., Macintyre, D., Elgaid, K., Stanley, C. and Thayne, I. (2004) The use of imprint lithography to fabricate high electron mobility transistors. In: International Conference on Electron, Photon, Ion beams and Nanofabrication, San Diego, USA,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Beam, Electron, Electron-Mobility, High Electron Mobility Transistor, High Electron Mobility Transistors, Imprint, Ion, Lithography, Mobility, Nanofabrication, Transistors |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Thoms, Dr Stephen and Stanley, Professor Colin and Elgaid, Dr Khaled and Macintyre, Dr Douglas |
| Authors: | Thoms, S., Macintyre, D., Elgaid, K., Stanley, C., and Thayne, I. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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