Pearson, J. and Cumming, D. (2004) A single-step method for making nanofluidic channels using electron beam lithography. In: Micro and Nano Engineering 2004, Rotterdam, The Netherlands,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Beam, Channel, Channels, Electron, Engineering, Lithography |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Cumming, Professor David |
| Authors: | Pearson, J., and Cumming, D. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Publisher: | Elsevier |
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