Zhou, H., Sim, C., Hodson, C., Kinsey, R. and Wilkinson, C. (2003) Deposition of ammonia-free silicon nitride using inductively coupled plasma at low temperature. In: 16th International Symposium on Plasma Chemistry, Sicily, Italy,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Chemistry, Nitride, Plasma, Silicon |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Zhou, Dr Haiping and Wilkinson, Professor Christopher |
| Authors: | Zhou, H., Sim, C., Hodson, C., Kinsey, R., and Wilkinson, C. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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