Terahertz tunable filters made by self-releasing deep dry etch process

Mills, G., Ferguson, S., Blaikie, R. and Cumming, D. (2003) Terahertz tunable filters made by self-releasing deep dry etch process. In: Micro and Nano Engineering - MNE 2003, Cambridge, UK,

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Item Type:Conference Proceedings
Keywords:Engineering, Filter, Terahertz, Tunable Filter
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Ferguson, Mrs Susan
Authors: Mills, G., Ferguson, S., Blaikie, R., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Publisher:Elsevier

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