Generation of photonic cystal patterns by single spot electron beam lithography

Kim, S., Chong, H., De La Rue, R. , Marsh, J. and Bryce, A. (2003) Generation of photonic cystal patterns by single spot electron beam lithography. In: Conference on Lasers and Electro-Optics - CLEO 2003, Baltimore, Maryland, USA,

Full text not currently available from Enlighten.


Item Type:Conference Proceedings
Keywords:Beam, Electron, Generation, Laser, Lasers, Lithography, Well
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Marsh, Professor John and De La Rue, Professor Richard and Bryce, Prof Ann
Authors: Kim, S., Chong, H., De La Rue, R., Marsh, J., and Bryce, A.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Publisher:Optical Society of America

University Staff: Request a correction | Enlighten Editors: Update this record