Chen, Y., Macintyre, D., Gourlay, D., Boyd, E., Moran, D., Cao, X., Thayne, I. and Thoms, S. (2003) The fabrication of 50nm T-gates using a PMMA.LOR.UVIII resist stack. In: EIPBN 2003 - Electron, ion and photon beam tehcnology and nanofabrication, Tampa, USA,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Beam, Electron, Fabrication, Ion, Nanofabrication, T-Gates |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Thoms, Dr Stephen and Macintyre, Dr Douglas |
| Authors: | Chen, Y., Macintyre, D., Gourlay, D., Boyd, E., Moran, D., Cao, X., Thayne, I., and Thoms, S. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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