Elgaid, K., McCloy, D. and Thayne, I. (2002) Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrate. In: Microelectronic and Nanoelectronic Engineering 2002, Lugano, Switzerland,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | CMOS, Engineering, GAAS, Mmic, PHEMTS, Su8 Negative Resist, Substrate |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Elgaid, Dr Khaled |
| Authors: | Elgaid, K., McCloy, D., and Thayne, I. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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