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Coplanar waveguide and spiral inductors for MMIC applications on low resistivity CMOS grade silicon using micromachined SU8 negative resist

Elgaid, K., McCloy, D., Edgar, D. and Thayne, I. (2002) Coplanar waveguide and spiral inductors for MMIC applications on low resistivity CMOS grade silicon using micromachined SU8 negative resist. In: European Microwave Conference, Milan, Italy,

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Item Type:Conference Proceedings
Keywords:CMOS, Inductors, Microwave, Mmic, Silicon, Spiral Inductors, Su8 Negative Resist, Waveguide
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thayne, Prof Iain and Elgaid, Dr Khaled
Authors: Elgaid, K., McCloy, D., Edgar, D., and Thayne, I.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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