Cao, X. and Thayne, I. (2002) Novel high uniformity highly reproducible non-selective wet recess etch for InP HEMTs. In: Microelectronic and Nanoelectronic Engineering 2002, Lugano, Switzerland,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Engineering, GAAS, HEMT, HEMTS, INP, Inp HEMTS, PHEMTS |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain |
| Authors: | Cao, X., and Thayne, I. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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