Kalna, K., Wang, Q., Passlack, M. and Asenov, A. (2006) MC simulation of delta doping placement in sub 100nm implant free InGaAs MOSFETs. In: E-MRS IUMRS ICEM 2006, Nice, France, Symposium.
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Delta Doping, Devices, Implant Free, INGAAS, Interface, MOSFET, MOSFETS, Simulation |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Asenov, Professor Asen and Kalna, Dr Karol |
| Authors: | Kalna, K., Wang, Q., Passlack, M., and Asenov, A. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Publisher: | European Materials Research Society |
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