Optical Properties of Silicon-rich Silicon Nitride for Photonic Integrated Circuits

Pruiti, N. G. , Gough, C., May, S. and Sorel, M. (2022) Optical Properties of Silicon-rich Silicon Nitride for Photonic Integrated Circuits. In: Conference on Lasers and Electro-Optics CLEO SI 2022, San Jose, CA., USA, 15-20 May 2022, SF3O.2. ISBN 9781957171050 (doi: 10.1364/CLEO_SI.2022.SF3O.2)

Abstract

The optical properties of silicon-rich silicon nitride are analyzed for different compositions, obtained by varying the deposition parameters. Here we demonstrate how the bandgap, refractive index, and thermo-optic coefficient depends on the relative silicon composition.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Pruiti, Mr Natale and Gough, Christopher and May, Mr Stuart and Sorel, Professor Marc
• Authors: Pruiti, N. G., Gough, C., May, S., and Sorel, M.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• ISBN: 9781957171050