3D Integration of Superconducting Chips with Through Silicon Vias

Weides, M. et al. (2022) 3D Integration of Superconducting Chips with Through Silicon Vias. 35th Integration Symposium on Superconductivity (ISS2022), Nagoya, Japan, 29 Nov - 01 Dec 2022.

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Abstract

No abstract available.

Item Type:Conference or Workshop Item
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Weides, Professor Martin and Nugent, Mr Nicholas and Seferai, Mr Valentino and Grant, Dr James and Paul, Dr Jharna
Authors: Weides, M., Nugent, N., Paul, J., Seferai, V., Grant, J., Hemakumara, T., Shu, Y., Besprozyannyy, D., Renzas, R., Jo, M., and Lindstrom, T.
College/School:College of Science and Engineering > School of Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Engineering > James Watt Nanofabrication Centre
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