Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing

Li, Z. , Smith, J. A., Scullion, M. , Kolja Wessling, N., McKnight, L. J. and Dawson, M. D. (2022) Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing. Optical Materials Express, 12(11), pp. 4375-4383. (doi: 10.1364/OME.474200)

Abstract

The heterogeneous integration of pre-fabricated lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 µm to 1.6 µm wavelength range, with a measured loaded Q-factor larger than 3.2 × 104.

• Item Type: Articles
• Additional Information: Funding: Engineering and Physical Sciences Research Council (EP/P013597/1, EP/R03480X/1, EP/T019697/1, EP/V004859/1); Innovate UK (50414); Royal Academy of Engineering (Research Chairs and Senior Research fellowships).
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Li, Dr Zhibo and Scullion, Dr Mark
• Authors: Li, Z., Smith, J. A., Scullion, M., Kolja Wessling, N., McKnight, L. J., and Dawson, M. D.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• Journal Name: Optical Materials Express
• Publisher: Optica Publishing Group
• ISSN: 2159-3930
• ISSN (Online): 2159-3930
• Published Online: 19 October 2022
• Copyright Holders: Copyright © 2022 The Authors
• First Published: First published in Optical Materials Express 12(11): 4375-4383
• Publisher Policy: Reproduced under a Creative Commons License
• Data DOI: 10.15129/bf442fef-80fd-4875-8c47-e81af64ce6d5

Project Code	Award No	Project Name	Principal Investigator	Funder's Name	Funder Ref	Lead Dept
301327		`Hetero-print: A holistic approach to transfer-printing for heterogeneous integration in manufacturing	Peter Skabara	Engineering and Physical Sciences Research Council (EPSRC)	EP/R03480X/1	ENG - Electronics & Nanoscale Engineering
306443		CORNERSTONE 2 - A UK Silicon Photonics Capability	Marc Sorel	Engineering and Physical Sciences Research Council (EPSRC)	EP/T019697/1	ENG - Electronics & Nanoscale Engineering