Simulation of intrinsic parameter fluctuations in decananometer and nanometer-scale MOSFETs

Asenov, A., Brown, A.R., Davies, J.H., Kaya, S. and Slavcheva, G. (2003) Simulation of intrinsic parameter fluctuations in decananometer and nanometer-scale MOSFETs. IEEE Transactions on Electron Devices, 50(9), pp. 1837-1852. (doi:10.1109/TED.2003.815862)



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Intrinsic parameter fluctuations introduced by discreteness of charge and matter will play an increasingly important role when semiconductor devices are scaled to decananometer and nanometer dimensions in next-generation integrated circuits and systems. In this paper, we review the analytical and the numerical simulation techniques used to study and predict such intrinsic parameters fluctuations. We consider random discrete dopants, trapped charges, atomic-scale interface roughness, and line edge roughness as sources of intrinsic parameter fluctuations. The presented theoretical approach based on Green's functions is restricted to the case of random discrete charges. The numerical simulation approaches based on the drift diffusion approximation with density gradient quantum corrections covers all of the listed sources of fluctuations. The results show that the intrinsic fluctuations in conventional MOSFETs, and later in double gate architectures, will reach levels that will affect the yield and the functionality of the next generation analog and digital circuits unless appropriate changes to the design are made. The future challenges that have to be addressed in order to improve the accuracy and the predictive power of the intrinsic fluctuation simulations are also discussed.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Asenov, Professor Asen
Authors: Asenov, A., Brown, A.R., Davies, J.H., Kaya, S., and Slavcheva, G.
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Research Group:Device Modelling Group
Journal Name:IEEE Transactions on Electron Devices
Publisher:Institute of Electrical and Electronics Engineers
Copyright Holders:Copyright © 2003 Institute of Electrical and Electronics Engineers
First Published:First published in IEEE Transactions on Electron Devices 50(9):1837-1852
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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