Belwanshi, V. , Prasad, A. , Toland, K. , Middlemiss, R. , Paul, D. and Hammond, G. (2022) Investigation of temperature sensitivity of a MEMS gravimeter based on geometric anti-spring. Review of Scientific Instruments, 93(12), 125002. (doi: 10.1063/5.0114664) (PMID:36586950)
![[img]](https://eprints.gla.ac.uk/style/images/fileicons/text.png) |
Text
287466.pdf - Published Version Available under License Creative Commons Attribution. 7MB |
Abstract
This paper describes a technique for temperature sensitivity or thermal sag measurements of a geometric anti-spring based microelectromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS gravimeter is currently fabricated on a (100) silicon wafer using standard micro-nano fabrication techniques. The thermal behavior of silicon indicates that the Young’s modulus of silicon decreases with increase in temperature (∼64 ppm/K). This leads to a softening of the silicon material, resulting in the proof mass displacing (or sagging) under the influence of increasing temperature. It results in a change in the measured gravity, which is expressed as temperature sensitivity in terms of change in gravity per degree temperature. The temperature sensitivity for the silicon based MEMS gravimeter is found to be 60.14–64.87, 61.76, and 62.76 µGal/mK for experimental, finite element analysis (FEA) simulation, and analytical calculations, respectively. It suggests that the gravimeter's temperature sensitivity is dependent on the material properties used to fabricate the MEMS devices. In this paper, the experimental measurements of thermal sag are presented along with analytical calculations and simulations of the effect using FEA. The bespoke optical measurement system to quantify the thermal sag is also described. The results presented are an essential step toward the development of temperature insensitive MEMS gravimeters.
| Item Type: | Articles |
|---|---|
| Additional Information: | This work was funded by the UK National Quantum Technology Hubs in Quantum Enhanced Imaging (Grant No. EP/M01326X/1), Sensing and Timing (Grant No. EP/T001046/1), NEWTON-g project funded by the EC’s Horizon 2020 program, under the FETOPEN-2016/2017 call (Grant Agreement No. 801221) and Royal Academy of Engineering Grant Nos. CiET2021_123 and RF/201819/18/83. |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Belwanshi, Dr Vinod and Hammond, Professor Giles and Toland, Dr Karl and Paul, Professor Douglas and Middlemiss, Dr Richard and Prasad, Dr Abhinav |
| Creator Roles: | Belwanshi, V.Conceptualization, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Validation, Writing – original draft, Writing – review and editing Prasad, A.Conceptualization, Writing – review and editing Toland, K.Formal analysis, Writing – review and editing Middlemiss, R.Writing – review and editing Paul, D.Funding acquisition, Writing – review and editing Hammond, G.Conceptualization, Funding acquisition, Writing – review and editing |
| Authors: | Belwanshi, V., Prasad, A., Toland, K., Middlemiss, R., Paul, D., and Hammond, G. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering College of Science and Engineering > School of Physics and Astronomy |
| Research Centre: | College of Science and Engineering > School of Physics and Astronomy > Institute for Gravitational Research |
| Journal Name: | Review of Scientific Instruments |
| Publisher: | AIP Publishing |
| ISSN: | 0034-6748 |
| ISSN (Online): | 1089-7623 |
| Published Online: | 01 December 2022 |
| Copyright Holders: | Copyright © 2022 The Authors |
| First Published: | First published in Review of Scientific Instruments 93(12): 125002 |
| Publisher Policy: | Reproduced under a Creative Commons License |
University Staff: Request a correction | Enlighten Editors: Update this record
Funder and Project Information
Funder and Project Information