Active region extent assessment with X-rays (AREA-X)

Poley, L., Blue, A. , Fadeyev, V. and Sperlich, D. (2022) Active region extent assessment with X-rays (AREA-X). Journal of Instrumentation, 17(11), T11009. (doi: 10.1088/1748-0221/17/11/t11009)

Abstract

The development of semiconductor sensors for new particle tracking detectors places increasing limits on sensor characteristics such as uniformity, size and shape of inefficient areas and size of active compared to inactive sensor areas. Accurately assessing these relatively subtle effects requires either measurements in particle beams or the modification of samples to be used in dedicated laser test setups. Active Region Extent Assessment with X-rays (AREA-X) has been developed as an alternative method for the fast, efficient and precise study of the active area of a semiconductor sensor. It uses a monochromatic, micro-focused X-ray beam with a 10–20 keV energy range as provided by several synchrotron beam lines and uses the photo current induced in the sensor to measure the depth of the responsive sensor volume. It can be used to study local inhomogeneities or inefficiencies, the overall extent of the active sensor volume and its shape and its localised application, which makes the need to gather statistics over a large area unnecessary, allowing for fast readout, which enables studies of the sensor behaviour at a range of external parameters, e.g. temperature or applied bias voltage. This paper presents the measurement concept and technical setup of the measurement, results from initial measurements as well as capabilities and limitations of the method.

• Item Type: Articles
• Additional Information: The authors would like to thank the Diamond Light Source for access to beam line B16 (proposals MT13500, MT15979, MT11807 and MM22002), where this method was developed and tested, especially Oliver Fox and Kawal Sawhney, for providing advice, support and maintenance during the experiment. This work was in part supported by the Canada Foundation for Innovation and the Natural Sciences and Engineering Research Council of Canada as well as the Alexander von Humboldt Foundation. The work at SCIPP was supported by the Department of Energy, grant DE-SC0010107.
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Blue, Dr Andrew
• Authors: Poley, L., Blue, A., Fadeyev, V., and Sperlich, D.
• College/School: College of Science and Engineering > School of Physics and Astronomy
• Journal Name: Journal of Instrumentation
• Publisher: Institute of Physics Publishing Ltd.
• ISSN: 1748-0221
• ISSN (Online): 1748-0221
• Published Online: 24 November 2022
• Copyright Holders: Copyright © 2022 The Author(s)
• First Published: First published in Journal of Instrumentation 17(11): T11009
• Publisher Policy: Reproduced under a Creative Commons License