Assessing the effect of scaling high-aspect-ratio ISFET with physical model interface for nano-biosensing application

Dhar, R., Kumar, N. , Pascual Garcia, C. and Georgiev, V. (2022) Assessing the effect of scaling high-aspect-ratio ISFET with physical model interface for nano-biosensing application. Solid-State Electronics, 195, 108374. (doi: 10.1016/j.sse.2022.108374)

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Abstract

In this paper, technology computer-aided design (TCAD) simulations of ion-sensitive field-effect transistors (ISFETs) are implemented using a physical model interface (PMI). Our simulations are based on a combination of analytical and numerical methods which are combined in a single simulation framework. ISFETs with different Si channel widths, such as 10nm and 50nm, have been simulated for this work. Our results reveal a correlation between the device dimensions and ISFET sensitivity (α). Also, the variations of H+ ions, OH- ions and surface potential (Ψ0) with respect to distance from the electrolyte/oxide interface are analyzed.

Item Type:Articles
Additional Information:This project has received funding from the European Union's Horizon 2020 research and innovation program under grant agreement No 862539-Electromed-FET OPEN.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Dhar, Ms Rakshita Pritam and Kumar, Dr Naveen and Georgiev, Professor Vihar
Authors: Dhar, R., Kumar, N., Pascual Garcia, C., and Georgiev, V.
College/School:College of Science and Engineering > School of Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Solid-State Electronics
Publisher:Elsevier
ISSN:0038-1101
ISSN (Online):1879-2405
Published Online:04 May 2022
Copyright Holders:Copyright © 2022 Elsevier Ltd.
First Published:First published in Solid-State Electronics 195:108374
Publisher Policy:Reproduced in accordance with the publisher copyright policy

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
305900Electrochemically-enabled high-throughput peptidomics for next-generation precision medicineVihar GeorgievEuropean Commission (EC)862539ENG - Electronics & Nanoscale Engineering