Vibration Suppression in MEMS Devices Using Electrostatic Forces

Khodaparast, H. H., Madinei, H., Friswell, M. I. and Adhikari, S. (2016) Vibration Suppression in MEMS Devices Using Electrostatic Forces. In: Active and Passive Smart Structures and Integrated Systems 2016, Las Vegas, NV, USA, 20-24 Mar 2016, p. 979917. ISBN 9781510600409 (doi: 10.1117/12.2222069)

Abstract

This paper investigates the use of electrostatic forces for vibration control of MEMS devices. A micro beam subject to electrostatic loading is considered. The electrostatic forces cause softening nonlinearity and their amplitudes are proportional to the square of applied DC voltages. An optimization problem is set up to minimize the vibration level of the micro-beam at given excitation frequencies. A new method based on incrementing nonlinear control parameters of the system and Harmonic Balance is used to obtain the required DC voltages that suppress unwanted vibration of the micro-beam. The results are illustrated using numerical simulations.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Adhikari, Professor Sondipon
• Authors: Khodaparast, H. H., Madinei, H., Friswell, M. I., and Adhikari, S.
• College/School: College of Science and Engineering > School of Engineering > Infrastructure and Environment
• ISSN: 0277-786X
• ISBN: 9781510600409