Biodegradable Zinc Oxide Thin Film Transistors

Kettle, J. and Kumar, D. (2021) Biodegradable Zinc Oxide Thin Film Transistors. In: 23rd European Microelectronics and Packaging Conference and Exhibition (EMPC 2021), Gothenburg, Sweden, 13-16 Sep 2021, ISBN 9780956808677

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In this work, biodegradable thin film transistors (TFTs) based on Zinc Oxide (ZnO) active layers are reported. To manufacture high performing devices, a planarization layer was applied onto the biodegradable substrate which led to a substantial decrease in the surface roughness and ensured that the substrate were smooth enough for device fabrication. ZnO TFTs were fabricated onto the planarized surface, tested and data supplied from the transfer curves showed a mobility of 2.9 cm 2 /s, an on/off ratio of 8 × 10 6 and a threshold voltage of 2.5 V. Methods to further improve device performance and future applications are discussed.

Item Type:Conference Proceedings
Glasgow Author(s) Enlighten ID:Kettle, Professor Jeff
Authors: Kettle, J., and Kumar, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Published Online:13 November 2021
Copyright Holders:Copyright © 2021 IEEE
Publisher Policy:Reproduced in accordance with the publisher copyright policy
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