Thermo-optic coefficient of PECVD silicon-rich silicon nitride

Pruiti, N. G., Klitis, C. , Gough, C., May, S. and Sorel, M. (2020) Thermo-optic coefficient of PECVD silicon-rich silicon nitride. Optics Letters, 45(22), pp. 6242-6245. (doi: 10.1364/OL.403357) (PMID:33186960)

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The thermo-optic coefficient (TOC) of photonic integrated waveguides fabricated on silicon-rich silicon nitride grown by plasma-enanched chemical vapor deposition is characterized for the first time, to the best of our knowledge. The TOC is found to increase linearly with the fractional composition of silicon over a range from that of silicon nitride to a-Si. This finding is significant for improving the power efficiency of thermally tuned photonic integrated circuits.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Gough, Christopher and Klitis, Dr Charalambos and Sorel, Professor Marc and May, Mr Stuart and Pruiti, Natale Giovanni
Authors: Pruiti, N. G., Klitis, C., Gough, C., May, S., and Sorel, M.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optics Letters
Publisher:Optical Society of America
ISSN (Online):1539-4794
Copyright Holders:Copyright © 2020 Optical Society of America
First Published:First published in Optics Letters 45(22):6242-6245
Publisher Policy:Reproduced under a Creative Commons license

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
173076Compact visible frequency combsMarc SorelEngineering and Physical Sciences Research Council (EPSRC)EP/P005624/1ENG - Electronics & Nanoscale Engineering
172610External engagement manager: CDT Photonic Integration for Advanced Data StorageJohn MarshEngineering and Physical Sciences Research Council (EPSRC)EP/L015323/1ENG - Electronics & Nanoscale Engineering
304171SuperpixelMartin LaveryEuropean Commission (EC)829116ENG - Electronics & Nanoscale Engineering