Pruiti, N. G. , Klitis, C. , Gough, C., May, S. and Sorel, M. (2020) Thermo-optic coefficient of PECVD silicon-rich silicon nitride. Optics Letters, 45(22), pp. 6242-6245. (doi: 10.1364/OL.403357) (PMID:33186960)
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Abstract
The thermo-optic coefficient (TOC) of photonic integrated waveguides fabricated on silicon-rich silicon nitride grown by plasma-enanched chemical vapor deposition is characterized for the first time, to the best of our knowledge. The TOC is found to increase linearly with the fractional composition of silicon over a range from that of silicon nitride to a-Si. This finding is significant for improving the power efficiency of thermally tuned photonic integrated circuits.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Pruiti, Mr Natale and Gough, Christopher and May, Mr Stuart and Klitis, Dr Charalambos and Sorel, Professor Marc |
| Authors: | Pruiti, N. G., Klitis, C., Gough, C., May, S., and Sorel, M. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Optics Letters |
| Publisher: | Optical Society of America |
| ISSN: | 0146-9592 |
| ISSN (Online): | 1539-4794 |
| Copyright Holders: | Copyright © 2020 Optical Society of America |
| First Published: | First published in Optics Letters 45(22):6242-6245 |
| Publisher Policy: | Reproduced under a Creative Commons license |
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