Calibration on the fly—a novel two-port S-parameter measurement method for on-wafer leaky systems

Wu, A., Liu, C., Liang, F., Zou, X., Wang, Y., Luan, P. and Li, C. (2020) Calibration on the fly—a novel two-port S-parameter measurement method for on-wafer leaky systems. IEEE Transactions on Microwave Theory and Techniques, 68(8), pp. 3558-3564. (doi: 10.1109/TMTT.2020.2988461)

[img]
Preview
Text
213723.pdf - Accepted Version

895kB

Abstract

In this article, we present a two-port on-wafer scattering parameter measurement method to tackle the issue of crosstalk between probes. The proposed method treats the crosstalk separately during the system calibration and the device measurement stages because the crosstalk during these stages is often different due to changes in the measurement conditions after the probes have been calibrated. For example, device under test (DUT) and calibration standards are often situated on different substrates, or the distance between probes during calibration is different from that during DUT measurement. Based on this concept, we develop a new error model in which the crosstalk is treated as a standalone two-port error network in parallel with the two-port calibration standards or DUTs. The two-port crosstalk error generated during probing, ECT, is removed in the system calibration and corrected during the measurement of the DUT by using a dummy pair of open-circuit standards that are fabricated on the same substrate as the DUT. Since the crosstalk is corrected while measuring the DUT, rather than during system calibration, we call this method ``calibration on the fly'' (COF). The method is demonstrated using measurements of a 10-dB attenuator between 140 and 220 GHz.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Li, Professor Chong
Authors: Wu, A., Liu, C., Liang, F., Zou, X., Wang, Y., Luan, P., and Li, C.
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Research Group:Microwave and Terahertz Electronics Group
Journal Name:IEEE Transactions on Microwave Theory and Techniques
Publisher:IEEE
ISSN:0018-9480
ISSN (Online):1557-9670
Published Online:06 May 2020
Copyright Holders:Copyright © 2020 IEEE
First Published:First published in IEEE Transactions on Microwave Theory and Techniques 68(8): 3558-3564
Publisher Policy:Reproduced in accordance with the publisher copyright policy

University Staff: Request a correction | Enlighten Editors: Update this record