Trimming of silicon-on-insulator ring-resonators via localized laser annealing

Biryukova, V., Sharp, G. J., Klitis, C. and Sorel, M. (2020) Trimming of silicon-on-insulator ring-resonators via localized laser annealing. Optics Express, 28(8), pp. 11156-11164. (doi: 10.1364/OE.389948)

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We propose a post-fabrication trimming method for the silicon-on-insulator photonic platform based on localised laser annealing of hydrogen silsesquioxane (HSQ) cladding. The technique is fast, does not degrade the device performance, does not require additional fabrication steps, and can therefore be implemented at minimal cost. Here we experimentally demonstrated how the spectrum of a ring resonator can be shifted by over 1 nm by annealing a section of the device as short as 30 µm, corresponding to a change in the effective refractive index of ∼10−2. Modifications of both the HSQ refractive index and its chemical structure as a function of the annealing temperature are also discussed. Trimming of multi-ring resonators indicate that this technique can be effectively used for post-fabrication reconfiguration of complex photonic circuits or to compensate for the fabrication tolerances of a typical CMOS process.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Klitis, Dr Charalambos and Sorel, Professor Marc and Biryukova, Vera and Sharp, Mr Graham
Authors: Biryukova, V., Sharp, G. J., Klitis, C., and Sorel, M.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optics Express
Publisher:Optical Society of America
ISSN (Online):1094-4087
Published Online:31 March 2020
Copyright Holders:Copyright © 2020 The Authors
First Published:First published in Optics Express 28(8): 11156-11164
Publisher Policy:Reproduced under a Creative Commons License
Data DOI:10.5525/gla.researchdata.990

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
170847CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsingMarc SorelEngineering and Physical Sciences Research Council (EPSRC)EP/L021129/1ENG - Electronics & Nanoscale Engineering
304171SuperpixelMartin LaveryEuropean Commission (EC)829116ENG - Electronics & Nanoscale Engineering