Multiple scattering in scanning helium microscopy

Lambrick, S.M., Vozdecký, L., Bergin, M., Halpin, J.E., MacLaren, D.A. , Dastoor, P.C., Pryborski, S.A., Jardine, A.P. and Ward, D.J. (2020) Multiple scattering in scanning helium microscopy. Applied Physics Letters, 116(6), 061601. (doi: 10.1063/1.5143950)

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Abstract

Using atom beams to image the surface of samples in real space is an emerging technique that delivers unique contrast from delicate samples. Here, we explore the contrast that arises from multiple scattering of helium atoms, a specific process that plays an important role in forming topographic contrast in scanning helium microscopy (SHeM) images. A test sample consisting of a series of trenches of varying depths was prepared by ion beam milling. SHeM images of shallow trenches (depth/width < 1) exhibited the established contrast associated with masking of the illuminating atom beam. The size of the masks was used to estimate the trench depths and showed good agreement with the known values. In contrast, deep trenches (depth/width > 1) exhibited an enhanced intensity. The scattered helium signal was modeled analytically and simulated numerically using Monte Carlo ray tracing. Both approaches gave excellent agreement with the experimental data and confirmed that the enhancement was due to localization of scattered helium atoms due to multiple scattering. The results were used to interpret SHeM images of a bio-technologically relevant sample with a deep porous structure, highlighting the relevance of multiple scattering in SHeM image interpretation.

Item Type:Articles
Additional Information:The work was supported by EPSRC grants EP/R008272/1 and EP/R008051/1.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:MacLaren, Dr Donald and Halpin, Dr John
Authors: Lambrick, S.M., Vozdecký, L., Bergin, M., Halpin, J.E., MacLaren, D.A., Dastoor, P.C., Pryborski, S.A., Jardine, A.P., and Ward, D.J.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Applied Physics Letters
Publisher:AIP Publishing
ISSN:0003-6951
ISSN (Online):1077-3118
Copyright Holders:Copyright © 2020 The Authors
First Published:First published in Applied Physics Letters 116(6): 061601
Publisher Policy:Reproduced under a Creative Commons License

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
302366Microscopy with neutral helium atoms: A wide-ranging new technique for delicate samplesDonald MaclarenEngineering and Physical Sciences Research Council (EPSRC)EP/R008051/1P&S - Physics & Astronomy