Marsh, J.H. , Hansen, S.I., Bryce, A.C. and De La Rue, R.M. (1991) Applications of neutral impurity disordering in fabricating low-loss optical waveguides and integrated waveguide devices. Optical and Quantum Electronics, 23(7), S941-S957. (doi: 10.1007/BF00624983)
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Abstract
Novel applications of impurity-induced disordering (IID) in semiconductor integrated optoelectronics are discussed and some requirements of the IID process are quantified. The effect of boron and fluorine as disordering species, in both GaAs/AlGaAs and GaInAs/AlGaInAs, has been studied. Because boron and fluorine are not active dopants at room temperature, low-loss high-resistivity waveguides can be formed. In the GaAs/AlGaAs system fluorine has been found to produce larger changes than boron for similar annealing conditions. Fluorine-disordered multiple quantum well waveguide structures exhibited blue shifts of up to 100 meV in the absorption edge (representing complete disordering). The absorption coefficient in partially disordered structures at near-band-edge wavelengths was as low as 4.7 dB cm−1. This absorption edge shift was accompanied by substantial changes, (>1%) in the refractive index. Boron- and fluorine-induced disordering of GaInAs/AlGaInAs quantum well structures lattice-matched to InP has also been investigated. Only small blue shifts in the exciton peak, ascribed to implantation damage, were observed in boron-implanted samples, but blue shifts of over 40 meV (again representing complete disordering) were observed in the fluorine-implanted samples.
Item Type: | Articles |
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Additional Information: | This work was supported financially by SERC through grants GR/D 31461, GR/D 99607 and GR/E 50117, by Norwegian Telecom and by STC Technology Ltd. |
Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Marsh, Professor John and De La Rue, Professor Richard |
Authors: | Marsh, J.H., Hansen, S.I., Bryce, A.C., and De La Rue, R.M. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Journal Name: | Optical and Quantum Electronics |
Publisher: | Kluwer Academic Publishers |
ISSN: | 0306-8919 |
ISSN (Online): | 1572-817X |
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