Meikle, A.R., Ledingham, K., Marsh, J.H. , More, B., O'Shea, V., Raine, C. and Smith, K.M. (1998) Technology development of 3-D GaAs radiation detectors. Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment, 410(1), pp. 115-123. (doi: 10.1016/S0168-9002(98)00191-0)
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Abstract
A novel type of GaAs radiation detector featuring a three-dimensional array of electrodes that penetrate through the detector bulk and the fabrication technology required are described. Using a pulsed Nd: YAG laser we have obtained repeatable round holes of 30 μm diameter with little or no taper and smooth internal walls. With a pulsed Ti: Sapphire laser we have obtained repeatable holes of 100 μm diameter with coarse internal walls. Drilling damage to the substrate is discussed along with possible prevention steps and post-drilling treatment.
Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Marsh, Professor John and Ledingham, Professor Kenneth |
Authors: | Meikle, A.R., Ledingham, K., Marsh, J.H., More, B., O'Shea, V., Raine, C., and Smith, K.M. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering College of Science and Engineering > School of Physics and Astronomy |
Journal Name: | Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment |
Publisher: | Elsevier |
ISSN: | 0168-9002 |
ISSN (Online): | 1872-9576 |
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