Technology development of 3-D GaAs radiation detectors

Meikle, A.R., Ledingham, K., Marsh, J.H. , More, B., O'Shea, V., Raine, C. and Smith, K.M. (1998) Technology development of 3-D GaAs radiation detectors. Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment, 410(1), pp. 115-123. (doi: 10.1016/S0168-9002(98)00191-0)

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Abstract

A novel type of GaAs radiation detector featuring a three-dimensional array of electrodes that penetrate through the detector bulk and the fabrication technology required are described. Using a pulsed Nd: YAG laser we have obtained repeatable round holes of 30 μm diameter with little or no taper and smooth internal walls. With a pulsed Ti: Sapphire laser we have obtained repeatable holes of 100 μm diameter with coarse internal walls. Drilling damage to the substrate is discussed along with possible prevention steps and post-drilling treatment.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Marsh, Professor John and Ledingham, Professor Kenneth
Authors: Meikle, A.R., Ledingham, K., Marsh, J.H., More, B., O'Shea, V., Raine, C., and Smith, K.M.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Physics and Astronomy
Journal Name:Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Publisher:Elsevier
ISSN:0168-9002
ISSN (Online):1872-9576

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