High-spatial-resolution quantum-well intermixing process in GaInAs/GaInAsP laser structure using pulsed-photoabsorption-induced disordering

Ong, T.K., Gunawan, O., Ooi, B.S., Lam, Y.L., Chan, Y.C., Zhou, Y., Helmy, A. S. and Marsh, J.H. (2000) High-spatial-resolution quantum-well intermixing process in GaInAs/GaInAsP laser structure using pulsed-photoabsorption-induced disordering. Journal of Applied Physics, 87(6), pp. 2775-2779. (doi: 10.1063/1.372255)

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Abstract

Raman spectroscopy was used to study the spatial resolution of pulsed-photoabsorption-induced quantum-well intermixing in a GaInAs/GaInAsP laser structure. A differential band gap shift of up to 60 meV has been obtained from a sample masked with SixNy/Au and exposed to the laser irradiation. Intermixing was detected in the irradiated regions through the shift of GaAs-like modes to lower frequencies. In addition, the intermixing induced GaInP longitudinal optical modes in the irradiated regions, which is evidence of the intermixing between the upper GaInAs cap and the GaInAsP layer. The spatial resolution of this process, which was obtained from micro-Raman spectra when scanned across the interface of the intermixing mask, was found to be better than 2.5 μm.

Item Type:Articles
Additional Information:This work was supported by Academic Research Funds, Ministry of Education (Singapore) under Grant Nos. RG47/96 and RG 18/97.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Marsh, Professor John
Authors: Ong, T.K., Gunawan, O., Ooi, B.S., Lam, Y.L., Chan, Y.C., Zhou, Y., Helmy, A. S., and Marsh, J.H.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Journal of Applied Physics
Publisher:AIP Publishing
ISSN:0021-8979
ISSN (Online):1089-7550
Published Online:25 February 2000

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