Li, X. , Reza, M., Steer, M., Gaetano, E.D., Sorel, M. , Thayne, I.G. , Lusk, D. and MacGregor, C. (2018) Etching Process for Producing Various Sloping Sidewall of III-V Antimonide-based Materials for LED/PD Applications. 62nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Puerto Rico, 29 May - 1 June 2018.
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Abstract
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| Item Type: | Conference or Workshop Item |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Professor Iain and Sorel, Professor Marc and Reza, Mr Manuel and Steer, Dr Matthew and Li, Dr Xu |
| Authors: | Li, X., Reza, M., Steer, M., Gaetano, E.D., Sorel, M., Thayne, I.G., Lusk, D., and MacGregor, C. |
| College/School: | College of Science and Engineering College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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Deposit and Record Details
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