CMOS nanophotonic sensor with integrated readout system

Shakoor, A. , Cheah, B. C. , al-Rawhani, M. A., Grande, M., Grant, J. , Gouveia, L. C. P. and Cumming, D. R.S. (2018) CMOS nanophotonic sensor with integrated readout system. IEEE Sensors Journal, 18(22), pp. 9188-9194. (doi: 10.1109/JSEN.2018.2870255)

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The measurement of nanophotonic sensors currently requires the use of external measuring equipment for their read-out such as an optical spectrum analyzer, spectrophotometer, or detectors. This requirement of external laboratory-based measuring equipment creates a “chip-in-a-lab” dilemma and hinders the use of nanophotonic sensors in practical applications. Making nanophotonic sensors usable in everyday life requires miniaturization of not only the sensor chip itself but also the equipment used for its measurement. In this paper, we have removed the need of external measuring equipment by monolithically integrating 1-D grating structures with a complementary metal-oxide-semiconductor (CMOS) integrated circuit having an array of photodiodes. By doing so, we get a direct electrical read-out of the refractive index changes induced when applying different analytes to grating structures. The gratings are made of CMOS compatible silicon nitride. Employing a nanophotonic sensor made of CMOS compatible material allows fabrication of the integrated sensor chip in a commercial CMOS foundry, enabling mass production for commercialization with low cost. Our results present a significant step toward transforming present laboratory-based nanophotonic sensors into practical portable devices to enable applications away from the analytical laboratory. We anticipate the work will have a major impact on technology for personalized medicine, environmental, and industrial sensing.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Al-Rawhani, Dr Mohammed and Shakoor, Dr Abdul and Gouveia, Mr Luiz and Grant, Dr James and Cumming, Professor David and Cheah, Dr Boon Chong
Authors: Shakoor, A., Cheah, B. C., al-Rawhani, M. A., Grande, M., Grant, J., Gouveia, L. C. P., and Cumming, D. R.S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Sensors Journal
ISSN (Online):1558-1748
Published Online:19 September 2018
Copyright Holders:Copyright © 2018 IEEE
First Published:First published in IEEE Sensors Journal 18(22): 9188-9194
Publisher Policy:Reproduced under a Creative Commons License
Data DOI:10.5525/gla.researchdata.432

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
605821The Multi-Corder: Poly-Sensor TechnologyDavid CummingEngineering and Physical Sciences Research Council (EPSRC)EP/K021966/1ENG - ENGINEERING ELECTRONICS & NANO ENG