Banerjee, A., Heath, R. M. , Morozov, D. , Hemakumara, D., Nasti, U., Thayne, I. and Hadfield, R. H. (2018) Optical properties of refractory metal based thin films. Optical Materials Express, 8(8), pp. 2072-2088. (doi: 10.1364/OME.8.002072)
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Abstract
There is a growing interest in refractory metal thin films for a range of emerging nanophotonic applications including high temperature plasmonic structures and infrared superconducting single photon detectors. We present a detailed comparison of optical properties for key representative materials in this class (NbN, NbTiN, TiN and MoSi) with texture varying from crystalline to amorphous. NbN, NbTiN and MoSi have been grown in an ultra-high vacuum sputter deposition system. Two different techniques (sputtering and atomic layer deposition) have been employed to deposit TiN. We have carried out variable angle ellipsometric measurements of optical properties from ultraviolet to mid infrared wavelengths. We compare with high resolution transmission electron microscopy analysis of microstructure. Sputter deposited TiN and MoSi have shown the highest optical absorption in the infrared wavelengths relative to NbN, NbTiN or ALD deposited TiN. We have also modelled the performance of a semi-infinite metal air interface as a plasmonic structure with the above mentioned refractory metal based thin films as the plasmonic components. This study has implications in the design of next generation superconducting nanowire single photon detector or plasmonic nanostructure based devices.
| Item Type: | Articles |
|---|---|
| Additional Information: | The authors acknowledge support from the UK Engineering and Physical Sciences Research Council (awards: EP/M01326X/1 QuantIC Quantum Technology Hub; EP/L024020/1). RHH and DM acknowledge support through a European Research Council Consolidator Grant (IRIS 648604). |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Banerjee, Mr Archan and Hadfield, Professor Robert and Nasti, Umberto and Morozov, Dr Dmitry and Heath, Mr Robert and Hemakumara, Miss Dilini |
| Authors: | Banerjee, A., Heath, R. M., Morozov, D., Hemakumara, D., Nasti, U., Thayne, I., and Hadfield, R. H. |
| College/School: | College of Science and Engineering College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Optical Materials Express |
| Publisher: | Optical Society of America |
| ISSN: | 2159-3930 |
| ISSN (Online): | 2159-3930 |
| Copyright Holders: | Copyright © 2018 The Optical Society of America |
| Publisher Policy: | Reproduced under a Creative Commons License |
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