High-precision XY stage motion control of industrial microscope

Lim, L. H. I. and Yang, D. (2019) High-precision XY stage motion control of industrial microscope. IEEE Transactions on Industrial Electronics, 66(3), pp. 1984-1992. (doi: 10.1109/TIE.2018.2838102)

161979.pdf - Accepted Version



This paper presents an economic way to implement a high precision (um level) XY stage motion control for the industrial microscope using DC motors. Other than the prevailing design of using stepper motors where the stage is always locked under the motorized mode, the proposed design allows users to manually move the stage by introducing the friction engagement in between. The nonlinearity from the friction is then fully compensated by the sliding mode control (SMC) so that the stage can strictly follow the predefined motion profile. Possible chattering suppression methods are discussed and the accuracy loss is analyzed using LuGre friction model. Finetuning algorithm is then proposed to limit the position error within u2 um. Comparing to the other um-level industrial microscopes using stepper motors, the proposed solution achieves comparable performance with much lower costs.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Lim, Dr Li Hong Idris
Authors: Lim, L. H. I., and Yang, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Transactions on Industrial Electronics
Publisher:Institute of Electrical and Electronics Engineers
ISSN (Online):1557-9948
Published Online:24 May 2018
Copyright Holders:Copyright © 2018 IEEE
First Published:First published in IEEE Transactions on Industrial Electronics 66(3):1984-1992
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

University Staff: Request a correction | Enlighten Editors: Update this record