Influence on AlN Growth of Different Sputtering Conditions

Lee, C.K., Placido, F., Cochran, S. and Kirk, K.J. (2003) Influence on AlN Growth of Different Sputtering Conditions. Ferroelectrics UK 2003, Belfast, Northern Ireland, Apr 2003.

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Abstract

No abstract available.

Item Type:Conference or Workshop Item
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cochran, Professor Sandy and Kirk, Dr Katherine
Authors: Lee, C.K., Placido, F., Cochran, S., and Kirk, K.J.
College/School:College of Science and Engineering > School of Engineering > Systems Power and Energy

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