A Physics-based Investigation of Pt-salt Doped Carbon Nanotubes for Local Interconnects

Liang, J. et al. (2017) A Physics-based Investigation of Pt-salt Doped Carbon Nanotubes for Local Interconnects. In: 2017 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, USA, 02-06 Dec 2017, 35.5.1-35.5.4. ISBN 9781538635599 (doi: 10.1109/IEDM.2017.8268502)

159398.pdf - Accepted Version



We investigate, by combining physical and electrical measurements together with an atomistic-to-circuit modeling approach, the conductance of doped carbon nanotubes (CNTs) and their eligibility as possible candidate for next generation back-end-of-line (BEOL) interconnects. Ab-initio simulations predict a doping-related shift of the Fermi level, which reduces shell chirality variability and improves electrical conductance up to 90% by converting semiconducting shells to metallic. Circuit-level simulations predict up to 88% signal delay improvement with doped vs. pristine CNT. Electrical measurements of Pt-salt doped CNTs provide up to 50% of resistance reduction which is a milestone result for future CNT interconnect technology.

Item Type:Conference Proceedings
Glasgow Author(s) Enlighten ID:Asenov, Professor Asen and Lee, Mr Jaehyun and Berrada, Dr Salim and Sadi, Dr Toufik and Georgiev, Professor Vihar
Authors: Liang, J., Ramos, R., Dijon, J., Okuno, H., Kalita, D., Renaud, D., Lee, J., Georgiev, V.P., Berrada, S., Sadi, T., Asenov, A., Uhlig, B., Lilienthal, K., Dhavamani, A., Konemann, F., Gotsmann, B., Goncalves, G., Chen, B., Teo, K., Pandey, R. R., and Todri-Sanial, A.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Published Online:25 January 2018
Copyright Holders:Copyright © 2017 Crown
First Published:First published in 2017 IEEE International Electron Devices Meeting (IEDM): 35.5.1-35.5.4
Publisher Policy:Reproduced in accordance with the publisher copyright policy

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
701891CONNECTAsen AsenovEuropean Commission (EC)688612ENG - ENGINEERING ELECTRONICS & NANO ENG