Patil, S. B. , Vaidya, S., Kumbhar, A., Dusane, R.O., Chandorkar, A.N. and Ramgopal Rao, V. (2000) Low Temperature Hot-Wire CVD Nitrides for Deep Sub-Micron CMOS Technologies. In: Tenth International Workshop on the Physics of Semiconductor Devices, Delhi, India, 14-18 Dec 1999, pp. 879-882. ISBN 9780819436016
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| Item Type: | Conference Proceedings |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Patil, Dr Samadhan |
| Authors: | Patil, S. B., Vaidya, S., Kumbhar, A., Dusane, R.O., Chandorkar, A.N., and Ramgopal Rao, V. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| ISBN: | 9780819436016 |
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