Patil, S.B. , Chu, V. and Conde, J. P. (2007) Surface micromachining of a thin film microresonator using dry decomposition of a polymer sacrificial layer. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 25(2), 455. (doi: 10.1116/1.2715972)
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Abstract
Fabrication of thin film silicon bridge microresonators on glass substrates using an unzipping sacrificial polymer has been demonstrated. Polynorbornene, which can be thermally decomposed at ∼425°C∼425°C, has been used as the sacrificial layer, allowing a simple, fully dry sacrificial layer removal. The polynorbornene is spin coated onto the substrate and patterned by photolithography. A thin film silicon structural layer is deposited by rf plasma-enhanced chemical vapor deposition and patterned to form a microbridge. The microbridges are electrostatically actuated and the resulting deflection is measured optically. The fabricated microbridges show resonance frequencies of the order of ∼4.4MHz∼4.4MHz and quality factors ∼450∼450.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Patil, Dr Samadhan |
| Authors: | Patil, S.B., Chu, V., and Conde, J. P. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Publisher: | AIP Publishing |
| ISSN: | 1071-1023 |
| ISSN (Online): | 1520-8567 |
| Published Online: | 26 March 2007 |
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