Patil, S.B. , Guedes, A., Freitas, P. P., Cardoso, S., Chu, V. and Conde, J. P. (2009) On-chip magnetoresistive detection of resonance in microcantilevers. Applied Physics Letters, 95(2), 023502. (doi: 10.1063/1.3174912)
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Abstract
Magnetoresistive spin-valve sensors were used to provide on-chip detection of the mechanical resonance of a thin silicon microelectromechanical systems cantilever. The spin-valve sensor was placed underneath the free end of the cantilever. A CoCrPt thin-film permanent magnet was placed on top of the amorphous silicon/Al cantilever. The cantilever was electrostatically actuated and its deflection creates a change in the magnetic field that can be sensed by the spin-valve sensor. The resonance frequency of the structure in the megahertz range is detected by the measurement of the spin-valve sensor output. Minimum deflection detection limit is determined to be 0.06 Å/Hz1/2.
Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Patil, Dr Samadhan |
Authors: | Patil, S.B., Guedes, A., Freitas, P. P., Cardoso, S., Chu, V., and Conde, J. P. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Journal Name: | Applied Physics Letters |
Publisher: | AIP Publishing |
ISSN: | 0003-6951 |
ISSN (Online): | 1077-3118 |
Published Online: | 14 July 2009 |
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