Patil, S.B. , Chu, V. and Conde, J.P. (2009) Mass sensing using an amorphous silicon MEMS resonator. Procedia Chemistry, 1(1), pp. 1063-1066. (doi: 10.1016/j.proche.2009.07.265)
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Abstract
Bilayer micro-bridge resonators of amorphous silicon and titanium were fabricated on a glass substrate at 100°C by surface micromachining using an aluminum sacrificial layer. Au square patterns with sub-micrometer dimensions were patterned on top of the microresonators. These Au squares allowed specific immobilization of thiolated single strand DNA probe oligonucleotides. The frequency response of the electrostatically-actuated resonators was measured optically. The mass loading effect of the Au squares and of the immobilized ssDNA probes were determined by the shift in the resonance frequency of the micro-bridge resonators.
Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Patil, Dr Samadhan |
Authors: | Patil, S.B., Chu, V., and Conde, J.P. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Journal Name: | Procedia Chemistry |
Publisher: | Elsevier |
ISSN: | 1876-6196 |
ISSN (Online): | 1876-6196 |
Published Online: | 04 September 2009 |
Copyright Holders: | Copyright © 2009 The Authors |
First Published: | First published in Procedia Chemistry 1(1):1063-1066 |
Publisher Policy: | Reproduced under a Creative Commons License |
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